목차
1-1. Non-annealing, 50kHz
1-2. Non-annealing, 100kHz
1-3. Non-annealing, 1MHz
1-4. Non-annealing, 비교/분석
2-1. Annealing, 50kHz
2-2. Annealing, 100kHz
2-3. Annealing, 1MHz
2-4. Annealing, 비교/분석
3. Nom-annealing / Annealing 비교/분석
1-2. Non-annealing, 100kHz
1-3. Non-annealing, 1MHz
1-4. Non-annealing, 비교/분석
2-1. Annealing, 50kHz
2-2. Annealing, 100kHz
2-3. Annealing, 1MHz
2-4. Annealing, 비교/분석
3. Nom-annealing / Annealing 비교/분석
본문내용
MS contacts C-V analysis
1-1. Non-annealing, 50kHz
C-V data
1/C^2 versus V plot
N-type device
1-2. Non-annealing, 100kHz
C-V data
1/C^2 versus V plot
N-type device
1-3. Non-annealing, 1MHz
C-V data
1/C^2 versus V plot
N-type device
1-4. Non-annealing, 비교/분석
C-V data
1/C^2 versus V plot
2-1. Annealing, 50kHz
C-V data
1/C^2 versus V plot
N-type device
2-2. Annealing, 100kHz
C-V data
1/C^2 versus V plot
N-type device
2-3. Annealing, 1MHz
C-V data
1/C^2 versus V plot
N-type device
2-4. Annealing, 비교/분석
C-V data
1/C^2 versus V plot
3. Nom-annealing / Annealing 비교/분석
50kHz
C-V data
1/C^2 versus V plot
100kHz
C-V data
1/C^2 versus V plot
1MHz
C-V data
1/C^2 versus V plot
1-1. Non-annealing, 50kHz
C-V data
1/C^2 versus V plot
N-type device
1-2. Non-annealing, 100kHz
C-V data
1/C^2 versus V plot
N-type device
1-3. Non-annealing, 1MHz
C-V data
1/C^2 versus V plot
N-type device
1-4. Non-annealing, 비교/분석
C-V data
1/C^2 versus V plot
2-1. Annealing, 50kHz
C-V data
1/C^2 versus V plot
N-type device
2-2. Annealing, 100kHz
C-V data
1/C^2 versus V plot
N-type device
2-3. Annealing, 1MHz
C-V data
1/C^2 versus V plot
N-type device
2-4. Annealing, 비교/분석
C-V data
1/C^2 versus V plot
3. Nom-annealing / Annealing 비교/분석
50kHz
C-V data
1/C^2 versus V plot
100kHz
C-V data
1/C^2 versus V plot
1MHz
C-V data
1/C^2 versus V plot