photolithography

소개글

photolithography에 대한 보고서 자료입니다.

목차

1. what's the photholithography?

2. Process of photolithography

3. Development of photoresist

4. Mask alignment and Exposure

5. Development and Hard baking

6. Etch and Photoresist removal

본문내용

History of photolithography..
Historically, lithography is a type of printing technology that is based on the chemical repellence of oil and water.
In 1826, Joseph Nicephore Niepce, in Chalon, France, takes the first photograph using bitumen of Judea on a pewter plate, developed using oil of lavender and mineral spirits
In 1935, Louis Minsk of Eastman Kodak developed the first negative photoresist
In 1940, Otto Suess developed the first positive photoresist.
In 1954, Louis Plambeck, Jr., of Du Pont, develops the Dycryl polymeric letterpress plate

키워드

photolithography,   photoresist,   Etch and phothoresist